Alumina Ceramic Insulation Supports For Semiconductor Manufacturing Equipment And Vacuum Coating Chambers
Product Introduction
The alumina ceramic insulating support ring is manufactured from high-purity (above 99%) alumina material, featuring exceptional electrical insulation properties, mechanical strength, and high-temperature resistance. This product maintains stable physical and chemical performance even in high-temperature, high-pressure, and corrosive environments, widely used for insulation support and positioning in power electronics, vacuum equipment, and other fields.
Primary Applications
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Electrical Equipment: High-voltage switches, insulators, circuit breakers
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Electronics Industry: Semiconductor manufacturing equipment, vacuum coating chambers
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New Energy: Fuel cell stacks, electrolyzer insulation components
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Vacuum Technology: High-vacuum system insulation supports
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High-Temperature Equipment: Kiln, heating device insulation structures
Key Advantages
✅ Ultra-High Insulation: Volume resistivity >10¹⁴Ω·cm (room temperature)
✅ High-Temperature Resistance: Continuous operating temperature up to 1600°C
✅ High Mechanical Strength: Compressive strength >2000MPa
✅ Precision Dimensions: Tolerance up to ±0.01mm
✅ Corrosion Resistance: Resists acid/alkali erosion (except hydrofluoric acid)
Technical Specifications
| Parameter | Specification |
| Material | 99% Al₂O₃ |
| Density | 3.8-3.9 g/cm³ |
| Flexural Strength | ≥350 MPa |
| Dielectric Strength | ≥15 kV/mm |
| Thermal Expansion Coefficient | 7.2×10⁻⁶/°C |
| Surface Roughness | Ra≤0.4μm |
| Operating Temperature Range | -50°C to 1600°C |
Manufacturing Process
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Raw Material Processing: Fine grinding of high-purity alumina powder
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Forming Process: Isostatic pressing/injection molding
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High-Temperature Sintering: 1700-1800°C atmosphere-protected sintering
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Precision Machining: CNC internal/external cylindrical grinding
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Laser Marking: Product identification and traceability
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Inspection & Packaging: Dimensional inspection + insulation testing
Installation Guidelines
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Clean contact surfaces before installation to remove oil and contaminants
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Avoid edge impacts to prevent brittle fracture
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For high-temperature environments, recommend gradual temperature installation
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Regularly check insulation resistance (suggest every 6 months)
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Consider thermal expansion differences when mating with metal components
After-Sales Service Commitment
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Free technical consultation and selection support
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48-hour response for non-human damage cases
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Custom development based on drawings
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Regular maintenance manual updates
Frequently Asked Questions (FAQ)
Q: What is the maximum withstand voltage?
A: Standard products 15kV/mm, specially designed up to 30kV/mm
Q: Can complex-shaped structures be manufactured?
A: Custom complex shapes available, minimum wall thickness ≥1mm
Q: How to test insulation performance?
A: Megohmmeter testing recommended (test voltage 1000V DC)
Q: How to fix with metal components?
A: Recommend high-temperature adhesive bonding or mechanical clamping
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Alumina Ceramic Insulation Supports For Semiconductor Manufacturing Equipment And Vacuum Coating Chambers Images
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